| 《主要用途》Applications ・半导体制造装置的载入室 For load-lock chamber of semiconductor manufacturing equipment ・电子显微镜的辅助泵 As a backing pump for electron microscopes ・真空蒸着装置 Vacuum coating system ・半导体制造装置用干式真空泵 High vacuum dry pump for semi-conductor process equipment ・各种干式真空排气装置 For general vacuum instruments |
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